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Software for Semiconductor Processes, Devices, Circuits and Systems

Software for Semiconductor Processes, Devices, Circuits and Systems

 Software for Simulation and Design

  Circuit Simulation | Schematic Capture | Layout | Systems | Technology | Manufacturing | Miscellaneous

 

 Prof. Dr.-Ing. Holger Vogt
14/07/2009

 

On  this web page I would like to present you some information on freely available  software for setting up a design environment for integrated  circuits. It is a personal selection, therefore a little bit biased and not  complete. I have also to confess that we, my coworkers at EBS and myself  are not capable to support the usage of the software mentioned.  However, due to many people using and improving it, there will be lots of  information and maybe also support available on the internet.  Of course we also cannot provide any warranty for the software mentioned.

If  you start developing a (not to complex) integrated circuit, firstly there  have to be system considerations. After fixing a specification,  a schematic has to be devised and entered into the computer ( Schematic  capture ).  The resulting circuit will be simulated, optimized and finally  transferred into data for manufacturing ( Layout ).  Fabrication may  then follow with a manufacturing process in the cleanroom of a semiconductor  fab. For supporting all these steps free software is available,  which has been developed mostly at universities all around the world. The  result might not be a complete integrated design environment. But if you  like to learn about circuit design, process development  and manufacturing and create small circuit, a heterogeneous environment,  which you may assemble from the following is still useful.

 

Circuit simulation

The classic simulation tool for circuit design is the program SPICE, developed at the University of California at Berkeley. Here you will find the Download of DuSpice,a version of SPICE3f5 for MS Windows (98, NT) as a self extracting file DuSpiceWin.exe with 1.576 MB size or as a Zip-File, 1.534 MB. This program version is based on the original spice3f4 code from Berkeley, but includes the most recent Berkeley MOS models (BSIM3v3.3.0, BSIM4.6.4, BSIMSOI3.2 and BSIMSOI4.1 for SOI devices) and the surface potential control based model HiSIM1.2.0 from STARC, Yokohama. Input has to be given via the standard ASCII text file, output is another text file or the standard SPICE binary file. Plotting is available either from inside the program, for the most important simulations also you may also plot via an EXCEL file (coming with appropriate macros). Accompanying parameters describing transistors also stem from Berkeley’s and Yokohama’s web pages. Transient noise simulation now is supported by an noise generator option to current and voltage sources.

Schematic Capture

To enter a circuit diagram into the computer, a dedicated drawing program is useful, which includes appropriate libraries to enter the schematic. If this program also generates a SPICE input file directly from the schematic, then you may immediately start your design, simulate and improve it. Here I recommend Xcircuit, which is available for LINUX, UNIX and MS Windows. A version for native Windows is available at: http://www.geocities.com/sw286000.

Layout

To  be converted to an IC, the circuit concept, schematic or system description  has to be transferred into a layout. You will need a complex  graphics tool for doing so. Two programs available for free will be presented  here:

  • LASI is a tool originally written for Windows, which is  under continuous development.
  • MAGIC again was originally developed at Berkeley. Different versions have been  assembled and unified recently to Version 7.1, which is available for LINUX,  UNIX (source code) or Windows. Before starting under Windows, you will need an  extra XServer (see below).

Both  programs are mighty tools. Besides layout they support design rule check  (DRC), circuit libraries, SPICE deck generation etc.. They need a setup,  which describes the underlying technology and they require  some training. Both addresses also provide technology setups (e.g. for MOSIS). You may find other free layout editors at http://layout.sourceforge.net/links/index.html, for example Layout-Editor or Glade.

    

System design

The  design of electronic circuits and systems at a higher abstraction level is  currently done with dedicated high level languages, e.g. VHDL ( http://tech-www.informatik.uni-hamburg.de/vhdl/).  You will need a compiler which is typically part of a large commercial software package. A promising approach is the idea to enhance standard C++ by classes and libraries, which allow the description and simulation of hardware. Electronic systems which include both hardware and software (Codesign) are ideally described with this approach. The learning phase to use these languages is not to difficult if you have C++ know how. To mention here is SystemC, which may be downloaded free of charge as a supplement to C++ under LINUX,  UNIX or MS Windows.

    

Technology and devices

 Before you start and expensive manufacturing run for process  development (this is my original profession at IMS, see http://www.ims.fraunhofer.de), it is absolutely useful to simulate the technology, its dopant distribution  and thickness and behavior of all layers. Quick results are obtainable with  a one dimensional technology simulator, which realistically simulates and plots doping density, diffusion and oxidation. As an input  you will need the process schedule (the run sheet). A 1D tool is  called TESIM, which is the source of several commercial simulators. A native windows version of TESIM is available here (zip file, 776 kB). Unfortunately the manual is currently only available in German (If you like to translate it to english, please let me know). Another famous simulator is SUPREM III from Stanford  university  .

To obtain simulation results of modern short channel devices, you will need at least two dimensional simulation. Firstly the 2D dopant and layer profile is required. A UNIX variant of SUPREM IV also from Stanford is available as open source. I do not know of a Windows port of this program. You will find however LINIUX  patches at http://mysite.verizon.net/dave_clark/stanford.html. For UNIX, LINUX and Windows (with CygWin ) there is the  tool FLOOPS available.

2D device simulators will use the 2D dopant and layer distribution as input. They solve the semiconductor equations (Poisson- und continuity equations) on an optimized grid by numerical integration. Two sources have to be mentioned here. MINIMOS was developed at Wien university with the goal  to simulate MOS transistors. Another well known software called PISCES stems from Stanford university (its Windows version is at http://home.comcast.net/~john.faricelli/tcad.htm).

I have to concede that up to now I did not test the software mentioned in this chapter personally. Therefore any input or comment from outside is very welcome.

Manufacturing

The enormous, seemingly never ending progress of semiconductor technology depends very heavily on the immense progress of the semiconductor manufacturing know how and the machines and fabrication sites involved. Currently smallest feature size in manufacturing approaches 100 nm, to be undercut in the very near future. In the lab transistors with 25 nm channel length still behave reasonably. A manufacturing site with this capability is a very large undertaking, costing above 1 Billion US$. Appropriate planning and fab optimization is therefore mandatory. Economy and engineering have to be managed concurrently. This is reflected also in the literature, which summarized excellently at http://www.jkrconsult.com/capbib.htm

Currently I am developing a simulator called FabSim, which calculates the throughput of a (semiconductor) fab. As input it takes planned or available machines, the run sheets of processes installed and the lots to be started. Discrete cycle time simulation describes the fab behavior. Lots are started, they move through the fab, using their dedicated process sequence and the appropriate machines and finally are put out as wafers ready. Please visit http://www.fabsim.com if you need more information. On this web site you also will find a Windows test version of FabSim and FabSim Interactive for download. These tools are limited to five machine groups, but otherwise are complete including all input files and a short manual.

Miscellaneous

During the development for various projects sometimes software is created, which does not fit to the above categories, but nevertheless may be useful for other applications. A first example is Films. This program will determine the optical behavior (transmission, reflection) of transparent or absorbing thin film stacks on various substrates like silicon, glass, or air. You may calculate parameters for optical filters, antireflective coatings or complete Fabry-Perot resonators. EXCEL is used for plotting, the data may also saved in a file for further evaluation.


Remarks on the software cited on this web site

The sources for software download which I have cited often refer to Windows versions. Of course most programs are also available for UNIX (which was often the operating system during program development) or LINUX.

SPICE

Meanwhile for SPICE there exist several web sites which offer downloads of free and  non-limited simulators and of software cooperating with SPICE:
http://www.fe.uni-lj.si/spice,
http://www.winspice.co.uk,
http://www.soi.tec.ufl.edu/soispice.html,
http://www.linear.com/designtools/software/switchercad.jsp,
http://www.comefly.us/,
http://tclspice.sourceforge.net/ (outdated, see ngspice below),
http://ngspice.sourceforge.net/.

GnuCap is about to be developed as a replacement for Spice.

LAYOUT

For MAGIC under Windows you will need an Xserver.

System design

Miscellaneous

Last modified: Tuesday, 7/14/2009
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