Thin Film Deposition

ALD Reaktor komprimiertALD Reactor

Mini-ALD Reaction Chamber 1'': modularflow

 

 

 

 

 

Plasma Eins komprimiertCVD Reactor

CARBOLITE tube furnace up to 1700 °C

Hotwall-CVD-Reactor

Coldwall-CVD-Reactor

Plasma-CVD

PVD Reactor

 



Microsopy

rem

Cross Section Polisher:
Jeol IB-09010CP

SEM including EDX: Jeol JSM-6510 mit BRUKER Quantax 400

Nanosurf NaioAFM

Laboratory Equipment

glovebox

4 MBRAUN Gloveboxes

GS Glovebox Systemtechnik:Typ(Concept)T4ca

MBRAUN SPS-800 Solvent drying system

METTLER TOLEDO Karl-Fischer-Titrator

Gas drying

2 Ultra-Low Temperature Freezers (-80 °C)

2 Centrifuges (Hettich Universal 30F, Hettich EBA 21) and 1 Ultracentrifuge (Beckman Coulter Avanti J-30 I)

X-Ray Diffraction

Single Crystal X-Ray Diffraction: more...

Powder X-Ray Diffraction: more...

 

Assignments

Interested in XRD measurements?
Services

Spectroscopy

Other Equipment

induktionsofen komprimiert

​Induction Melter

Ultra Flex Power Technologies: EasyMelt 1P

 

 

 

 

 

 

 

hall komprimiert

Hall Effect Measurement System

Ecopia: HMS-3000

 

 

 

 

 

 

Masse komprimiert

Mass Spectrometer

Advion: Expression L CMS with APCI, ESI, OPSI