ICAN: Plasma Cleaner

Plasma Cleaner

The plasma cleaner, model TPS 316 by Binder Labortechnik, allows the cleaning of samples e.g. for TEM analysis.

The sample is inserted into the TEM sample holder and transferred into the plasma cleaner. After pump down a oxygen/argon plasma is ignited, which removes carbon compounds from the sample surface.

This is usually used for FIB-cuts and cross section samples, as the often used carbon TEM grids will also be disintegrated by the plasma.

Additionally the setup offers parking and storing samples on a sample holder at 10E-6 mbar.

Plasma Cleaner TPS 316 by Binder Labortechnik