ICAN: Ion Slicer
Ion Slicer
The Ion Slicer is used for the preparation of thin films using argon ion sputtering.
With this method samples for TEM-,STEM-,SEM- or SPM-investigations can be fabricated without the need for any chemicals.
The argon ions have a small incident angly onto the sample surface, minimizing radiation damage and amorphisation.
The sample can be tiltes by 30°, to achieve a homogenously polished area.
Specifications:
| Acceleration voltage: | 1-8 kV |
| Sputter rate: | 5µm/min |
| Sample size: | 0.8 mm (B )x 2.8 mm (L)x 0.1 mm (H) |
| Sample rotation: | +/-30° |
| Gas für ion beam: | Argon |
| Incident angle: | 0°-6° |
| Pressure gauge: | Penning tube |
| Main pump: | turbomolecular pump(TMP) |
| Pre pump: | rotary vane pump |
