​ALD Reactor

Mini-ALD Reaction Chamber 1'': modularflow

CVD Reactor

CARBOLITE tube furnace up to 1700 °C

Hotwall-CVD-Reactor

Coldwall-CVD-Reactor

Plasma-CVD

PVD Reactor

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​4 MBRAUN Gloveboxes

GS Glovebox Systemtechnik:Typ(Concept)T4ca

MBRAUN SPS-800 Solvent drying system

METTLER TOLEDO Karl-Fischer-Titrator

Gas drying

2 Ultra-Low Temperature Freezers (-80 °C)

2 Centrifuges (Hettich Universal 30F, Hettich EBA 21) and 1 Ultracentrifuge (Beckman Coulter Avanti J-30 I)

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​NMR: BRUKER Avance 300

IR: BRUKER Alpha with ATR-Unit

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​​Induction Melter

Ultra Flex Power Technologies: EasyMelt 1P

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​Hall Effect Measurement System

Ecopia: HMS-3000

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​Mass Spectrometer

Advion: Expression L CMS with APCI, ESI, OPSI