Desktop SEM dimensions

• 2kV up to 15 kV acceleration voltage
• Magnification up to 1,000,000
• Schottky-FEG
• Sample size up to 25mm diameter
• Sample height up to 100mm
• Variable vaccum mode (low-/medium-/high-mode)

Detectors

• 1 - 4-quadrant back scatter electron detector (BSE)
• 2 - Everhart-Thornley secondary electron detector (SE)
• 3 - chemical composition determination with EDX detector (SSD 25mm²)

SEM lateral resolution

• 2.5nm (SE), 4nm (BSE) at 15kV
• 10nm (SE) at 3kV

EDX

• Silicon Drift Detector (SDD)
• Thermoelectrically cooled (LN2 free)
• Active detector area 25mm²

Contact:
M. Farle
D. Spoddig