Cleanroom

Sample preparation

Specifications

  • Flowboxes with ISO 6 (ISO 14644)
  • hot plate up to 250°C
  • Spin Coater with up to 8000 rpm
  • Ultrasonic bath
  • Aceton and Isopropanol with cleanroom quality
  • DI water

U. Wiedwald
D. Spoddig

Electron beam lithography

Specifications

  • Spin coater with up to 8000 rpm
  • Different positiv/negative resists
  • Resist thickness up to 1000nm