Desktop SEM class

• 2kV up to 15kV accerleration voltage
• Magnification up to 1.000.000
• Schottky-FEG
• Sample diameter up to 25mm
• Sample hight up to 100mm
• Variable vacuum mode (low/medium/high)

Detectors

• 1 - 4 Quadrant backscatter electron detector (BSE)
• 2 - Everhart-Thornley secundary electron detector (SE)
• 3 - Chemical composition determination by EDX detector (SDD 25mm²)

SEM laterale resolution

• 2.5nm (SE), 4nm (BSE) at 15kV
• 10nm (SE) at 3kV

EDX

• Silicon Drift Detector (SDD)
• Cooling by peltier element (LN2 free)
• active detector surface 25mm²

Micromanipulator installed inside sample container

• MM3A-EM Kleindiek company
• XY-resolution: <0.5nm
• Z-resolution: 0.15nm
• Gas-insertion-system (GIS)

Contact:
M. Farle
D. Spoddig