Nanopartikel Erzeugung

Nanopartikel aus der Gasphase Nanopartikel Erzeugung

  • nanoparticles produces directly from the gas-phase without any chemical processing
  • plasma is generated by sputtering which condenses into primary particles in a liquid nitrogen cooled chamber (right)
  • particles are carried through a sintering furnace (middle) where the particles can be thermally processed before landing on a substrate in the deposition chamber (left)
  • nanoparticles of any material for which a sputter-target is available can be generated in quantities suitable for electron microscopy, transport, and magnetic property studies

M. Acet